ASML will be down

Mahnaz Mansourpour mahnaz at stanford.edu
Thu Sep 29 15:13:20 PDT 2011


Hello all,

The last few times during Asml pm running the red/blue--- oca tests we 
have encountered issues. ASML FSE has pin point the problem to reticle 
table motor.

The part will be replaced on Tuesday October 4^th and the system will be 
in test mode all night. Also the system is due for quarterly pm so the 
morning
of Wednesday the 5^th and Thursday the 6^th Asml will perform the pm.

So to capture it again ASML will be down on Tuesday 10/4 in the morning 
at 7:30 am  till Wednesday afternoon when the tests ran successfully.


Please plan accordingly...

Litho team

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