mahnaz at stanford.edu
Wed Apr 4 10:48:52 PDT 2012
I have made reservation for Monday 4/9 all morning.
The purge hood in the system needs height adjustment.
The purge hood will allow us to run thick resist 220-3, 220-7 in the system.
Please use the system till staff actually shuts down the tool for the
work, it might be a quick job or might take till 2:30 pm.
I apologize for any inconvenient this may cause.
More information about the asml