From mahnaz at stanford.edu  Fri Feb 24 14:18:20 2012
From: mahnaz at stanford.edu (Mahnaz Mansourpour)
Date: Fri, 24 Feb 2012 14:18:20 -0800
Subject: Make sure that your wafers are clean
Message-ID: <4F480CAC.2040209@stanford.edu>

hello all,

No matter what, you need to make sure that your wafers are clean and 
even more so NOW.

There is an issue with the system and  as you know we are not able to 
swing the stage in and out without the help from ASML.
So if you contaminate the chuck Gary and Mario are not able to help 
till  the problem get fixed.
I believe that Gary had sent out an detail message about this so

After spin
Inspect back of  every wafer
clean the ones have any EBR residue and particles with q-tips and acetone
Run all the wafers through SRD in designated cassette before committing 
them to ASML.

Let us know if you need help or have questions.

mahnaz




From mahnaz at stanford.edu  Tue Feb 28 09:31:48 2012
From: mahnaz at stanford.edu (Mahnaz Mansourpour)
Date: Tue, 28 Feb 2012 09:31:48 -0800
Subject: asml demo
Message-ID: <4F4D0F84.2070507@stanford.edu>

Hello all,

ASML needs to do a 6" demo next week on 3/6 and 3/7.
I believe on Tuesday the system will switch to 6" and will stay in 6" 
till following day ( system will be down to labmembers)

The system should be switched back to 4" on Wednesday and returned to us 
when the quals are done.

I Truly apologize for the delay in notifying you and thanks for your 
understanding.

mahnaz


From mahnaz at stanford.edu  Wed Feb 29 09:36:09 2012
From: mahnaz at stanford.edu (Mahnaz Mansourpour)
Date: Wed, 29 Feb 2012 09:36:09 -0800
Subject: asml down time
Message-ID: <4F4E6209.4050407@stanford.edu>

Hello all,

the system will be down on Saturday 3/3 from 9am till some times in the 
evening.

The procedure of changing  the wafers stage rotary mechanism can take 
from 8 to 12 hours.

Sorry for late notice , ASML tried to get the part from different 
sources and  was not sure of part arrival.

litho team