Make sure that your wafers are clean
mahnaz at stanford.edu
Fri Feb 24 14:18:20 PST 2012
No matter what, you need to make sure that your wafers are clean and
even more so NOW.
There is an issue with the system and as you know we are not able to
swing the stage in and out without the help from ASML.
So if you contaminate the chuck Gary and Mario are not able to help
till the problem get fixed.
I believe that Gary had sent out an detail message about this so
Inspect back of every wafer
clean the ones have any EBR residue and particles with q-tips and acetone
Run all the wafers through SRD in designated cassette before committing
them to ASML.
Let us know if you need help or have questions.
More information about the asml