asml down time

Mahnaz Mansourpour mahnaz at stanford.edu
Wed Feb 29 09:36:09 PST 2012


Hello all,

the system will be down on Saturday 3/3 from 9am till some times in the 
evening.

The procedure of changing  the wafers stage rotary mechanism can take 
from 8 to 12 hours.

Sorry for late notice , ASML tried to get the part from different 
sources and  was not sure of part arrival.

litho team



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