From ping.ding at asml.com Sat Jul 7 11:30:46 2012 From: ping.ding at asml.com (Ping Ding) Date: Sat, 7 Jul 2012 14:30:46 -0400 Subject: Urgent- ASML Stepper Scheduled Downtime- Please Read In-Reply-To: <0fd1fa35-2b91-4692-a9cc-d1ee873af5c6@Gary-PC> References: <25a7c55b-671a-4a3e-9803-89f9da5b069a@Gary-PC> <0fd1fa35-2b91-4692-a9cc-d1ee873af5c6@Gary-PC> Message-ID: Dear ASML Stepper users, ASML has completed its project and calibrated the machine back to its original configuration (except backside alignment). The system is up and available for use from now. I can?t change reservation made by Linda from now till 10pm tonight, but you are free to use. Thank you so much for your patience, understanding and support during two weeks for helping us complete the big project on time! Best of luck on your project! Best Regards, Ping Ding ASML Demo/Special Application Group From: Gary J Sosa [mailto:gsosa at stanford.edu] Sent: Thursday, June 21, 2012 1:58 PM To: asml at snf.stanford.edu Cc: Vinny Pici; Ping Ding; Linda Ohara; Mahnaz Mansourpour; Mario Vilanova; Carlos Berry; John Bumgarner; Brett Huff Subject: Urgent- ASML Stepper Scheduled Downtime- Please Read Hello Stepper Users.... This is a reminder that the ASML Special Applications Group has a very important project beginning Tuesday 6/26 at 7:30am and is scheduled to be completed late evening on July 7th. The project requires an extensive amount of tool time and there will be times when the tool will not be available in the late evenings and early mornings due to ongoing work or tool configuration. I have attached a time line that shows the project schedule and time needed. I will also post a copy at the Lab entrance and at the tool. Note that the areas on the schedule shaded in blue are times when the tool is available, only if needed. Please make arrangements with Litho staff if you absolutely have to use the stepper during this time, otherwise the tool will remain under ASML's control to avoid any potential problems that will put their critical work at risk. Also, the ending times are estimates, so if ASML completes their scheduled daily work early, they will release the tool time to the lab members. You will have to check on Coral for these updates. Please plan you Stepper activities accordingly and make alternate plans during this time. Thank you in advance for you patience and understanding from the SNF Staff and ASML Special Applications Group. Regards... The Litho Team -- The information contained in this communication and any attachments is confidential and may be privileged, and is for the sole use of the intended recipient(s). Any unauthorized review, use, disclosure or distribution is prohibited. Unless explicitly stated otherwise in the body of this communication or the attachment thereto (if any), the information is provided on an AS-IS basis without any express or implied warranties or liabilities. To the extent you are relying on this information, you are doing so at your own risk. If you are not the intended recipient, please notify the sender immediately by replying to this message and destroy all copies of this message and any attachments. ASML is neither liable for the proper and complete transmission of the information contained in this communication, nor for any delay in its receipt. -------------- next part -------------- An HTML attachment was scrubbed... URL: From jaypark at stanford.edu Thu Jul 12 11:31:58 2012 From: jaypark at stanford.edu (Jason Matthew Parker) Date: Thu, 12 Jul 2012 11:31:58 -0700 (PDT) Subject: [asml] 2pm-2:30pm today released In-Reply-To: <1425717986.826221518.1342117910117.JavaMail.root@zm08.stanford.edu> Message-ID: <580194761.826229072.1342117918002.JavaMail.root@zm08.stanford.edu> Picked up some morning time. Jason From haiwei at stanford.edu Wed Jul 25 23:34:29 2012 From: haiwei at stanford.edu (Hai Wei) Date: Wed, 25 Jul 2012 23:34:29 -0700 (PDT) Subject: PM alignment marks In-Reply-To: <1908377161.32702784.1343284246461.JavaMail.root@zm06.stanford.edu> Message-ID: <1461660810.32703118.1343284469073.JavaMail.root@zm06.stanford.edu> Hi Labmembers and ASML users, I am creating a mask for ASML using PM alignment marks. Does anyone know if it matters when the PM mark is close to the design patterns? I will have a design about 200um away from the PM marks. If you can comment on the feasibility and potential issues, that would be really appreciated. Thanks a lot! Hai From ping.ding at asml.com Thu Jul 26 12:27:53 2012 From: ping.ding at asml.com (Ping Ding) Date: Thu, 26 Jul 2012 15:27:53 -0400 Subject: PM alignment marks In-Reply-To: <1461660810.32703118.1343284469073.JavaMail.root@zm06.stanford.edu> References: <1908377161.32702784.1343284246461.JavaMail.root@zm06.stanford.edu> <1461660810.32703118.1343284469073.JavaMail.root@zm06.stanford.edu> Message-ID: Hi Hai, You should treat PM marks just as any regular pattern when placing it relative to other design patterns. In order not to get ghost image from neighboring pattern, ASML recommendation for chrome border (separation distance) is 1.24mm at wafer level (I think SNF recommendation goes even a bit higher, 1.4mm? Check it in Wiki). Hope this helps. Ping Ding (ASML apps engineer) -----Original Message----- From: Hai Wei [mailto:haiwei at stanford.edu] Sent: Wednesday, July 25, 2012 11:34 PM To: labmembers at snf.stanford.edu; asml at snf.stanford.edu Subject: PM alignment marks Hi Labmembers and ASML users, I am creating a mask for ASML using PM alignment marks. Does anyone know if it matters when the PM mark is close to the design patterns? I will have a design about 200um away from the PM marks. If you can comment on the feasibility and potential issues, that would be really appreciated. Thanks a lot! Hai -- The information contained in this communication and any attachments is confidential and may be privileged, and is for the sole use of the intended recipient(s). Any unauthorized review, use, disclosure or distribution is prohibited. Unless explicitly stated otherwise in the body of this communication or the attachment thereto (if any), the information is provided on an AS-IS basis without any express or implied warranties or liabilities. To the extent you are relying on this information, you are doing so at your own risk. If you are not the intended recipient, please notify the sender immediately by replying to this message and destroy all copies of this message and any attachments. ASML is neither liable for the proper and complete transmission of the information contained in this communication, nor for any delay in its receipt. From xuanwu at stanford.edu Mon Jul 30 09:51:04 2012 From: xuanwu at stanford.edu (Xuan Wu) Date: Mon, 30 Jul 2012 09:51:04 -0700 (PDT) Subject: 9:30am-10:30am today released In-Reply-To: <580194761.826229072.1342117918002.JavaMail.root@zm08.stanford.edu> Message-ID: <1239062314.1333745319.1343667064399.JavaMail.root@zm08.stanford.edu> Finished early. Xuan ----- Original Message ----- From: "Jason Matthew Parker" To: asml at snf.stanford.edu Sent: Thursday, July 12, 2012 11:31:58 AM Subject: [asml] 2pm-2:30pm today released Picked up some morning time. Jason From arion at stanford.edu Tue Jul 31 11:42:56 2012 From: arion at stanford.edu (Antonio Gellineau) Date: Tue, 31 Jul 2012 11:42:56 -0700 Subject: ASML 6pm-7pm today released Message-ID: <019b01cd6f4c$4e0f0fe0$ea2d2fa0$@stanford.edu> Wafers won't be ready.