Urgent- ASML Stepper Scheduled Downtime- Please Read

Ping Ding ping.ding at asml.com
Sat Jul 7 11:30:46 PDT 2012

Dear ASML Stepper users,

ASML has completed its project and calibrated the machine back to its original configuration (except backside alignment).  The system is up and available for use from now.  I can’t  change reservation made by Linda from now till 10pm tonight, but you are free to use.

Thank you so much for your patience, understanding and support during two weeks for helping us complete the big project on time!  Best of luck on your project!

Best Regards,
Ping Ding
ASML Demo/Special Application Group

From: Gary J Sosa [mailto:gsosa at stanford.edu]
Sent: Thursday, June 21, 2012 1:58 PM
To: asml at snf.stanford.edu
Cc: Vinny Pici; Ping Ding; Linda Ohara; Mahnaz Mansourpour; Mario Vilanova; Carlos Berry; John Bumgarner; Brett Huff
Subject: Urgent- ASML Stepper Scheduled Downtime- Please Read

Hello Stepper Users....

    This is a reminder that the ASML Special Applications Group has a very important project beginning Tuesday 6/26 at 7:30am and is scheduled to be completed late evening on July 7th. The project requires an extensive amount of tool time and there will be times when the tool will not be available in the late evenings and early mornings due to ongoing work or tool configuration. I have attached a time line that shows the project schedule and time needed. I will also post a copy at the Lab entrance and at the tool. Note that the areas on the schedule shaded in blue are times when the tool is available, only if needed. Please make arrangements with Litho staff if you absolutely have to use the stepper during this time, otherwise the tool will remain under ASML's control to avoid any potential problems that will put their critical work at risk. Also, the ending times are estimates, so if ASML completes their scheduled daily work early, they will release the tool time to the lab members. You will have to check on Coral for these updates. Please plan you Stepper activities accordingly and make alternate plans during this time. Thank you in advance for you patience and understanding from the SNF Staff and ASML Special Applications Group.

      Regards... The Litho Team

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