PM alignment marks

Hai Wei haiwei at stanford.edu
Wed Jul 25 23:34:29 PDT 2012


Hi Labmembers and ASML users, 

I am creating a mask for ASML using PM alignment marks. Does anyone know if it matters when the PM mark is close to the design patterns? I will have a design about 200um away from the PM marks. If you can comment on the feasibility and potential issues, that would be really appreciated. 

Thanks a lot!
Hai



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