PM alignment marks

Ping Ding ping.ding at
Thu Jul 26 12:27:53 PDT 2012

Hi Hai,

You should treat PM marks just as any regular pattern when placing it relative to other design patterns.  In order not to get ghost image from neighboring pattern, ASML recommendation for chrome border (separation distance) is 1.24mm at wafer level (I think SNF recommendation goes even a bit higher, 1.4mm? Check it in Wiki).

Hope this helps.

Ping Ding (ASML apps engineer)

-----Original Message-----
From: Hai Wei [mailto:haiwei at] 
Sent: Wednesday, July 25, 2012 11:34 PM
To: labmembers at; asml at
Subject: PM alignment marks

Hi Labmembers and ASML users, 

I am creating a mask for ASML using PM alignment marks. Does anyone know if it matters when the PM mark is close to the design patterns? I will have a design about 200um away from the PM marks. If you can comment on the feasibility and potential issues, that would be really appreciated. 

Thanks a lot!

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