PM alignment marks
ping.ding at asml.com
Thu Jul 26 12:27:53 PDT 2012
You should treat PM marks just as any regular pattern when placing it relative to other design patterns. In order not to get ghost image from neighboring pattern, ASML recommendation for chrome border (separation distance) is 1.24mm at wafer level (I think SNF recommendation goes even a bit higher, 1.4mm? Check it in Wiki).
Hope this helps.
Ping Ding (ASML apps engineer)
From: Hai Wei [mailto:haiwei at stanford.edu]
Sent: Wednesday, July 25, 2012 11:34 PM
To: labmembers at snf.stanford.edu; asml at snf.stanford.edu
Subject: PM alignment marks
Hi Labmembers and ASML users,
I am creating a mask for ASML using PM alignment marks. Does anyone know if it matters when the PM mark is close to the design patterns? I will have a design about 200um away from the PM marks. If you can comment on the feasibility and potential issues, that would be really appreciated.
Thanks a lot!
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