From xuanwu at stanford.edu Tue Jun 5 14:05:19 2012 From: xuanwu at stanford.edu (Xuan Wu) Date: Tue, 05 Jun 2012 14:05:19 -0700 Subject: thick resist Message-ID: <4FCE748F.8030104@stanford.edu> Hi fellow ASML users, I'm looking to do DRIE almost through my wafer, so I need a pretty thick mask. I had originally wanted to use 7 um resist, but the maintenance record shows that because of the removal of the purge/extraction hood, no resists 3.0 um or above are allowed. Because of front-side features, I cannot put down more oxide than what I already have. Does anyone have experience doing this kind of stuff after the hood removal, or have any suggestions for workarounds? My oxide is thermal and 600nm thick. Thanks in advance, Xuan From gsosa at stanford.edu Thu Jun 21 13:57:31 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Thu, 21 Jun 2012 13:57:31 -0700 (PDT) Subject: Urgent- ASML Stepper Scheduled Downtime- Please Read In-Reply-To: <25a7c55b-671a-4a3e-9803-89f9da5b069a@Gary-PC> Message-ID: <0fd1fa35-2b91-4692-a9cc-d1ee873af5c6@Gary-PC> Hello Stepper Users.... This is a reminder that the ASML Special Applications Group has a very important project beginning Tuesday 6/26 at 7:30am and is scheduled to be completed late evening on July 7th. The project requires an extensive amount of tool time and there will be times when the tool will not be available in the late evenings and early mornings due to ongoing work or tool configuration. I have attached a time line that shows the project schedule and time needed. I will also post a copy at the Lab entrance and at the tool. Note that the areas on the schedule shaded in blue are times when the tool is available, only if needed. Please make arrangements with Litho staff if you absolutely have to use the stepper during this time, otherwise the tool will remain under ASML's control to avoid any potential problems that will put their critical work at risk. Also, the ending times are estimates, so if ASML completes their scheduled daily work early, they will release the tool time to the lab members. You will have to check on Coral for these updates. Please plan you Stepper activities accordingly and make alternate plans during this time. Thank you in advance for you patience and understanding from the SNF Staff and ASML Special Applications Group. Regards... The Litho Team -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: ASML Project Schedule.pdf Type: application/pdf Size: 203659 bytes Desc: not available URL: