From gsosa at stanford.edu Tue Mar 6 15:54:48 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Tue, 6 Mar 2012 15:54:48 -0800 (PST) Subject: ASML 6" Demo Rescheduled for tomorrow(3/7) In-Reply-To: Message-ID: Hello Stepper Users... ASML's 6" demo has been rescheduled for Wednesday(3/7) and Thursday(3/8). The stepper will remain 6" until the completion of the Demo on Thursday, and will be unavailable to labmembers on Wednesday night and Thursday morning. The stepper will be converted back to 4 inch on Thursday and be released to users after qualification. So sorry for the late notice and the inconvenience. Regards.. The Litho Team -------------- next part -------------- An HTML attachment was scrubbed... URL: From mahnaz at stanford.edu Wed Mar 7 08:10:35 2012 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Wed, 07 Mar 2012 08:10:35 -0800 Subject: system is avaliable for use Message-ID: <4F57887B.7010908@stanford.edu> The system will get switched to 6" some times today but you can use it till further notice. mahnaz From mahnaz at stanford.edu Wed Mar 7 08:52:01 2012 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Wed, 07 Mar 2012 08:52:01 -0800 Subject: Available till noon today Message-ID: <4F579231.2060602@stanford.edu> From mahnaz at stanford.edu Fri Mar 9 18:29:06 2012 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Fri, 09 Mar 2012 18:29:06 -0800 Subject: asml is up Message-ID: <4F5ABC72.6070104@stanford.edu> Hello all, It has been a long day but thanks to Chris Ringwelski ( asml fse) and Linda, the system is up and ready for use. Please keep in mind that system is up *only for top side alignment.* *3D has not been calibrated.* We just did particle on the chuck so please follow the back side cleaning protocol for your wafers. If rusty, there is a copy of the clean procedure in the binder next to the tool. cheers litho team -------------- next part -------------- An HTML attachment was scrubbed... URL: From rthowe at stanford.edu Sat Mar 10 11:46:25 2012 From: rthowe at stanford.edu (Roger T. Howe) Date: Sat, 10 Mar 2012 11:46:25 -0800 Subject: asml is up In-Reply-To: <4F5ABC72.6070104@stanford.edu> References: <4F5ABC72.6070104@stanford.edu> Message-ID: <4F5BAF91.6060602@stanford.edu> Mahnaz, Carlos, Chris, Gary, Linda, and Vinny, Great news that we've got the ASML back in action. Thanks for the hard work it took to bring it up. It bears repeating that we need to keep it clean to keep it up. ASML users: let's keep particles off the chuck by following the cleaning procedures exactly! Thanks, Roger On 3/9/12 6:29 PM, Mahnaz Mansourpour wrote: > Hello all, > > It has been a long day but thanks to Chris Ringwelski ( asml fse) and > Linda, the system is up and ready for use. > Please keep in mind that system is up *only for top side alignment.* > *3D has not been calibrated.* > > We just did particle on the chuck so please follow the back side > cleaning protocol for your wafers. > If rusty, there is a copy of the clean procedure in the binder next > to the tool. > > cheers > litho team > > > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From mahnaz at stanford.edu Thu Mar 15 13:17:48 2012 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Thu, 15 Mar 2012 13:17:48 -0700 Subject: Monthly pm in March Message-ID: <4F624E6C.2050403@stanford.edu> Hello all, Just a head up that asml is due for monthly pm next week. Monthly is two days but we are taking *3 days from Tuesday 3/20 to 3/22.* One day extra is to check low lamp intensity on the tool. *The tool will be avaliable every day after 4 pm. * mahnaz -------------- next part -------------- An HTML attachment was scrubbed... URL: From gyama.snf at gmail.com Sat Mar 24 06:57:54 2012 From: gyama.snf at gmail.com (Gary Yama - SNF) Date: Sat, 24 Mar 2012 06:57:54 -0700 Subject: from previous user, software locked up, reticle box stuck, no keyboard response Message-ID: From cmcg at stanford.edu Sat Mar 24 12:54:54 2012 From: cmcg at stanford.edu (Chris McGuinness) Date: Sat, 24 Mar 2012 12:54:54 -0700 (PDT) Subject: from previous user, software locked up, reticle box stuck, no keyboard response In-Reply-To: Message-ID: <233241533.20930853.1332618894214.JavaMail.root@zm10.stanford.edu> Hi all, Does anybody know how to reset the system? It is not responding to our simple attempts to unload the reticle elevator. A few of us would love to play with the tool today if possible. Thanks, Chris ----- Original Message ----- From: "Gary Yama - SNF" To: asml at snf.stanford.edu Sent: Saturday, March 24, 2012 6:57:54 AM Subject: from previous user, software locked up, reticle box stuck, no keyboard response From cmcg at stanford.edu Sun Mar 25 23:09:25 2012 From: cmcg at stanford.edu (Chris McGuinness) Date: Sun, 25 Mar 2012 23:09:25 -0700 (PDT) Subject: ASML up, thanks Gary In-Reply-To: <1130886963.21265921.1332742107061.JavaMail.root@zm10.stanford.edu> Message-ID: <1577914343.21266059.1332742165246.JavaMail.root@zm10.stanford.edu> A big thanks to Gary for coming in this morning and getting ASML up and running! It was a big help to some of us. Cheers, Chris From ysohn at stanford.edu Mon Mar 26 11:38:20 2012 From: ysohn at stanford.edu (Young Ik Sohn) Date: Mon, 26 Mar 2012 11:38:20 -0700 (PDT) Subject: ASML cancelled 13:00-13:30 In-Reply-To: <1794164113.1288893.1332787090010.JavaMail.root@zm08.stanford.edu> Message-ID: <973557779.1289011.1332787100806.JavaMail.root@zm08.stanford.edu> Sorry for the late notice. - Young Ik From cmcg at stanford.edu Tue Mar 27 17:27:46 2012 From: cmcg at stanford.edu (Chris McGuinness) Date: Tue, 27 Mar 2012 17:27:46 -0700 (PDT) Subject: asml free, finished early In-Reply-To: <341990447.22248415.1332894455905.JavaMail.root@zm10.stanford.edu> Message-ID: <1763591673.22248445.1332894466467.JavaMail.root@zm10.stanford.edu> How often does that happen! lucky me