asml is up
mahnaz at stanford.edu
Fri Mar 9 18:29:06 PST 2012
It has been a long day but thanks to Chris Ringwelski ( asml fse) and
Linda, the system is up and ready for use.
Please keep in mind that system is up *only for top side alignment.*
*3D has not been calibrated.*
We just did particle on the chuck so please follow the back side
cleaning protocol for your wafers.
If rusty, there is a copy of the clean procedure in the binder next to
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