asml is up

Mahnaz Mansourpour mahnaz at stanford.edu
Fri Mar 9 18:29:06 PST 2012


Hello all,

It has been a long day but thanks to Chris Ringwelski ( asml fse) and 
Linda, the system is up and ready for use.
Please keep in mind that system is up *only for top side alignment.*
*3D  has not been calibrated.*

We just did particle on the chuck so please follow the back side  
cleaning  protocol for your wafers.
If rusty, there is a copy of the clean procedure  in the binder next to 
the tool.

cheers
litho team




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