asml is up
Roger T. Howe
rthowe at stanford.edu
Sat Mar 10 11:46:25 PST 2012
Mahnaz, Carlos, Chris, Gary, Linda, and Vinny,
Great news that we've got the ASML back in action. Thanks for the hard
work it took to bring it up.
It bears repeating that we need to keep it clean to keep it up. ASML
users: let's keep particles off the chuck by following the cleaning
On 3/9/12 6:29 PM, Mahnaz Mansourpour wrote:
> Hello all,
> It has been a long day but thanks to Chris Ringwelski ( asml fse) and
> Linda, the system is up and ready for use.
> Please keep in mind that system is up *only for top side alignment.*
> *3D has not been calibrated.*
> We just did particle on the chuck so please follow the back side
> cleaning protocol for your wafers.
> If rusty, there is a copy of the clean procedure in the binder next
> to the tool.
> litho team
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