Monthly pm in March
Mahnaz Mansourpour
mahnaz at stanford.edu
Thu Mar 15 13:17:48 PDT 2012
Hello all,
Just a head up that asml is due for monthly pm next week.
Monthly is two days but we are taking *3 days from Tuesday 3/20 to 3/22.*
One day extra is to check low lamp intensity on the tool.
*The tool will be avaliable every day after 4 pm. *
mahnaz
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