Monthly pm in March

Mahnaz Mansourpour mahnaz at
Thu Mar 15 13:17:48 PDT 2012

Hello all,

Just a head up that asml is due for monthly pm next week.
Monthly is two days but we are taking *3 days from Tuesday 3/20 to 3/22.*
One day extra is to check low lamp  intensity on the tool.

*The tool will be avaliable every day after 4 pm. *

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