From mahnaz at stanford.edu Thu May 3 08:46:29 2012 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Thu, 03 May 2012 08:46:29 -0700 Subject: Do not run thick resists Message-ID: <4FA2A855.3070403@stanford.edu> Hello all, *Do not run any thick resists on ASML till further notice, please.* The purge hood got damaged last week and ASML has ordered the parts. The purge hood exhaust the out gassing of the 220-3 and 220-7 from the tool, otherwise the out-gassing cause by these resists will coat the bottom of the lens and that will create other serious issues with the tool. Litho team -------------- next part -------------- An HTML attachment was scrubbed... URL: From gyama.snf at gmail.com Mon May 7 14:36:37 2012 From: gyama.snf at gmail.com (Gary Yama - SNF) Date: Mon, 7 May 2012 14:36:37 -0700 Subject: wafers not ready, free 4-5pm today Message-ID: From mahnaz at stanford.edu Wed May 16 15:26:43 2012 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Wed, 16 May 2012 15:26:43 -0700 Subject: ASML demo/calibration wafers Message-ID: <4FB429A3.7030502@stanford.edu> Hello all, Just a heads up that Asml needs some time on the tool. From June 26th to June 29th, there is one overnight request, on June 27th. July 2nd and 3rd the tool will not be avaliable to SNF. July 4th to 7th we can request time on the tool ( please let me know so We can arrange that ). The chart explains the time availability on different days, let me know if there are any concerns or issues. Date Day Estimated tool time needed (hr) Tool time requesting Agreed tool time System config: 4" vs 6" Need Overnight? Comment 25-Jun Monday No tool time needed.ASML preparation. 26-Jun Tuesday 6 7:30 - 4 As requested 4" No Have 1 wafer ready by 3:30pm and etch at the end of Tue. 27-Jun Wednesday 10 7:30 - overnight As requested 4"-6" Yes 28-Jun Thursday 5.5 -4 As requested 6"-4" No Have 1 wafer ready by 3:30pm and etch at the end of Thu. 29-Jun Friday 15 7:30 - 12am As requested 4" No 30-Jun Saturday 1-Jul Sunday 2-Jul Monday 10 7:30 - overnight overnight 4"-6" Yes etch 49 wafers at the beginning of Mon. 3-Jul Tuesday 11.5 whole day overnight 6"-4" Yes 4-Jul Wednesday 11 - 8pm overnight 4" Not a must US holiday 5-Jul Thursday 12 7:30 - 10pm overnight 4" Not a must etch 49 wafers at the beginning of Thu. 6-Jul Friday 12 7:30 - 10pm overnight 4" Not a must 7-Jul Saturday 12 7:30 - 10pm Return system by 10pm 4" No -------------- next part -------------- An HTML attachment was scrubbed... URL: