Do not run thick resists
mahnaz at stanford.edu
Thu May 3 08:46:29 PDT 2012
*Do not run any thick resists on ASML till further notice, please.*
The purge hood got damaged last week and ASML has ordered the parts.
The purge hood exhaust the out gassing of the 220-3 and 220-7 from the
the out-gassing cause by these resists will coat the bottom of the lens
and that will create other serious issues with the tool.
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