Do not run thick resists

Mahnaz Mansourpour mahnaz at stanford.edu
Thu May 3 08:46:29 PDT 2012


Hello all,

*Do not run any thick resists on ASML till further notice, please.*

The purge hood got damaged last week and ASML has ordered the parts.
The purge hood exhaust the out gassing of the 220-3 and 220-7 from the 
tool, otherwise
the out-gassing cause by these resists will coat the bottom of the lens 
and that will create other serious issues with the tool.

Litho team


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