From jaypark at stanford.edu Fri Nov 2 14:36:23 2012 From: jaypark at stanford.edu (Jason Parker) Date: Fri, 2 Nov 2012 14:36:23 -0700 (PDT) Subject: [asml] Free Now to 3:30 pm Message-ID: <1150813465.3774651.1351892183947.JavaMail.root@stanford.edu> ASML free Friday, Nov 2, now until 3:30pm. Started early/finished early. Jason From xzhuan1 at gmail.com Sun Nov 11 10:36:27 2012 From: xzhuan1 at gmail.com (Steve Zhuang) Date: Sun, 11 Nov 2012 10:36:27 -0800 Subject: Monday 10:30-12, 3:30-4 released Message-ID: I moved my reservation to later in the night and released the day-time slots. Sorry about the late notice. Steve Z. -------------- next part -------------- An HTML attachment was scrubbed... URL: From chen0622 at yahoo.com Mon Nov 12 07:22:01 2012 From: chen0622 at yahoo.com (Chih-Chang Chen) Date: Mon, 12 Nov 2012 07:22:01 -0800 (PST) Subject: ASML 10:30 to 11:30 AM reservation released today Message-ID: <1352733721.18907.YahooMailNeo@web122404.mail.ne1.yahoo.com> An HTML attachment was scrubbed... URL: From colbybellew at yahoo.com Mon Nov 12 10:39:52 2012 From: colbybellew at yahoo.com (Colby Bellew) Date: Mon, 12 Nov 2012 10:39:52 -0800 (PST) Subject: ASML reservation removed Monday 11:30-12:30 Message-ID: <1352745592.79255.YahooMailRC@web80704.mail.mud.yahoo.com> Scheduling problems mean I won't be able to use my reservation this morning From sclaussen at stanford.edu Mon Nov 12 13:43:38 2012 From: sclaussen at stanford.edu (Stephanie Claussen) Date: Mon, 12 Nov 2012 13:43:38 -0800 Subject: ASML available today, 1:30-2pm Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From eperalta at stanford.edu Sat Nov 17 17:00:28 2012 From: eperalta at stanford.edu (Edgar Peralta) Date: Sat, 17 Nov 2012 17:00:28 -0800 Subject: ASML shutdown over the weekend! :( In-Reply-To: References: Message-ID: It looks like the tool has been shutdown for the weekend due to a wafer being stuck inside. * Is there any chance of anyone coming to re-set the tool before Monday? This is a high-use machine and I suspect this shutdown will affect many: from a user's perspective their work will be set back and from SNF's perspective the lab losing money. This problem seems to occur often, it happened to me Friday (albeit at 2am so disruption was minimal) and I've learned to re-check wafer flatness (despite hundreds of wafers previously ran without problems). * I wonder if perhaps it would be possible to train a few experienced users the recovery procedure so that long shutdowns like this can be avoided? Sincerely, -- *Edgar A. Peralta * *Ph.D. Candidate, *Stanford University Department of Applied Physics *M*: 954.940.2700 -------------- next part -------------- An HTML attachment was scrubbed... URL: From mahnaz at stanford.edu Mon Nov 19 09:55:46 2012 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Mon, 19 Nov 2012 09:55:46 -0800 Subject: warp/stress wafer Message-ID: <50AA72A2.2000005@stanford.edu> Hello all, I have noted that the last few weeks few times wafers have gotten stuck in the system off hours and every time it was the User's wafers that they had some sort of warpage or stress. Let me remind you and refer you to the note that is posted next to the too ( every one of you read it before you get train on the tool) and wiki. *It is your responsibility to follow the procedure and make sure that wafers are flat before committing them to the system.** **need training on the stress tool or how to float the wafers on the rock, let me know that too.** **Staff will help you with wafers that are problematic during day time.** You are risking your privilege on the system and committing yorself to a honorable community work. mahnaz * -------------- next part -------------- An HTML attachment was scrubbed... URL: From insun at stanford.edu Tue Nov 20 17:07:26 2012 From: insun at stanford.edu (Insun Park) Date: Tue, 20 Nov 2012 17:07:26 -0800 Subject: reservation released from 8-9pm today (11/20) Message-ID: Sorry for late notice Insun -------------- next part -------------- An HTML attachment was scrubbed... URL: From eperalta at stanford.edu Tue Nov 20 20:59:41 2012 From: eperalta at stanford.edu (Edgar Peralta) Date: Tue, 20 Nov 2012 20:59:41 -0800 Subject: Emulator frozen Message-ID: Hi all, Just wanted to give you a heads up that the emulator froze up on me again while deleting some images. Not a big deal as people can continue to work inside the lab, but it will need a re-start whenever one is possible. Thanks, -- *Edgar A. Peralta * *Ph.D. Candidate, *Stanford University Department of Applied Physics *M*: 954.940.2700 -------------- next part -------------- An HTML attachment was scrubbed... URL: From insun at stanford.edu Wed Nov 21 17:26:04 2012 From: insun at stanford.edu (Insun Park) Date: Wed, 21 Nov 2012 17:26:04 -0800 Subject: reservation released from 5:30-6:30pm Message-ID: Sample not ready. Sorry for late notice. Insun -------------- next part -------------- An HTML attachment was scrubbed... URL: From hongyuc at stanford.edu Tue Nov 27 17:02:31 2012 From: hongyuc at stanford.edu (Henry Hong-Yu Chen) Date: Tue, 27 Nov 2012 17:02:31 -0800 Subject: ASML shutdown: 2 wafers stuck inside Message-ID: I tried fast start-up and full start-up to remove the wafers. but both didn't work... There are two wafers inside though one of them is missing on the screen. sorry for the inconvenience. From gsosa at stanford.edu Wed Nov 28 10:54:23 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Wed, 28 Nov 2012 10:54:23 -0800 (PST) Subject: Stranded wafers in ASML Stepper In-Reply-To: <181852b0-51e9-4b8c-b225-103883f0bed0@Gary-PC> Message-ID: Hello ASML Stepper Users.. Below are the Coral details of the most recent incident of wafers getting stuck in the stepper: Removed users stranded wafers. Wafer 1 failed at E-chuck because of a vacuum error. Visual inspection of the back of the wafer showed a small black artifact that has some height above the wafer surface. The wafer also did not float on the granite. Once again::: USERS- You are responsible for inspecting the backs of your wafers prior to processing them through the stepper. Especially small lots. This was a 2 wafer lot. It would not have taken that much time to inspect and test the wafers. Because of this, the tool was down for 16 hours and many users inconvenienced. PLEASE INSPECT YOUR WAFERS Also, if you think your wafers are high risk( bowed or warped), you can make arrangements with staff to test or process them during normal staff hours when resources are available. Thanks... Gary -------------- next part -------------- An HTML attachment was scrubbed... URL: