From emyers at snf.stanford.edu Wed Aug 18 10:59:10 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 18 Aug 2010 10:59:10 -0700 Subject: Shutdown aw610_l SNF 2010-08-18 10:59:10: Waiting Qualification Message-ID: System will be in Shutdown until the hardware has been accepted and tested. From emyers at snf.stanford.edu Tue Aug 31 16:09:34 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Tue, 31 Aug 2010 16:09:34 -0700 Subject: Comment aw610_l SNF 2010-08-31 16:09:33: Aug. 31 2010 Quals Message-ID: Ran 5 wafers at 1150C, same as the 4100 and 4108 sysytems. Measured on Woollam using RTO Qual program. Results in Angstroms. wafer 1: Avg 129 SD 2.8 wafer 2: Avg 130 SD 3.5 wafer 3: Avg 128 SD 3.2 wafer 4: Avg 132 SD 4.3 wafer 5: Avg 125 SD 3.9 May 14 Qual was 132 Ang By comparison the last quals for the automatic systems were AG4108 was: approx 100Ang with a SD of approx 4.5, but failed qual due to water flow issues AG4100 was: approx 135Ang with a SD of approx. 7 From emyers at snf.stanford.edu Tue Aug 31 16:10:01 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Tue, 31 Aug 2010 16:10:01 -0700 Subject: Shutdown aw610_l SNF 2010-08-18 10:59:10: Waiting Qualification Message-ID: Ran 5 wafers at 1150C, same as the 4100 and 4108 sysytems. Measured on Woollam using RTO Qual program. Results in Angstroms. wafer 1: Avg 129 SD 2.8 wafer 2: Avg 130 SD 3.5 wafer 3: Avg 128 SD 3.2 wafer 4: Avg 132 SD 4.3 wafer 5: Avg 125 SD 3.9 May 14 Qual was 132 Ang By comparison the last quals for the automatic systems were AG4108 was: approx 100Ang with a SD of approx 4.5, but failed qual due to water flow issues AG4100 was: approx 135Ang with a SD of approx. 7 From emyers at snf.stanford.edu Tue Aug 31 16:11:14 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Tue, 31 Aug 2010 16:11:14 -0700 Subject: Problem aw610_l SNF 2010-08-31 16:11:13: Partial Release Message-ID: I am releasing the system for pyrometer only recipes. Please contact me regarding your usage. I will work with the lab members to implement TC controlled recipes and use of a susceptor.