Comment aw610_l SNF 2010-08-31 16:09:33: Aug. 31 2010 Quals

emyers at snf.stanford.edu emyers at snf.stanford.edu
Tue Aug 31 16:09:34 PDT 2010


Ran 5 wafers at 1150C, same as the 4100 and 4108 sysytems. Measured on Woollam using RTO Qual program. Results in Angstroms. 
wafer 1: Avg 129 SD 2.8
wafer 2: Avg 130 SD 3.5
wafer 3: Avg 128 SD 3.2
wafer 4: Avg 132 SD 4.3
wafer 5: Avg 125 SD 3.9
May 14 Qual was 132 Ang
By comparison the last quals for the automatic systems were
AG4108 was: approx 100Ang with a SD of approx 4.5, but failed qual due to water flow issues
AG4100 was: approx 135Ang with a SD of approx. 7




More information about the aw610_l-pcs mailing list