From jasonlin at snf.stanford.edu  Mon Feb  7 22:16:10 2011
From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu)
Date: Mon, 7 Feb 2011 22:16:10 -0800
Subject: Problem aw610_l SNF 2011-02-07 22:16:09: Residue on wafer backside
Message-ID: <mailman.13.1356281070.3414.aw610_l-pcs@snf.stanford.edu>

After running RTA at 1000C, there is some silvery-colored residue on some portion of the wafer backside.  What is causing this?  The wafer only had Si, SiO2, and SiN.



From emyers at snf.stanford.edu  Fri Feb 11 13:05:11 2011
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Fri, 11 Feb 2011 13:05:11 -0800
Subject: Problem aw610_l SNF 2011-02-07 22:16:09: Residue on wafer backside
Message-ID: <mailman.14.1356281070.3414.aw610_l-pcs@snf.stanford.edu>

I talked with the lab member.  It happened on one wafer and not on his following lots.  Inherently there is not anything in the chamber which can cause these problems.  High temperatures can highlight artifacts ono wafers.  The root cause remains unknown.