Problem aw610_l SNF 2011-02-07 22:16:09: Residue on wafer backside

jasonlin at snf.stanford.edu jasonlin at snf.stanford.edu
Mon Feb 7 22:16:10 PST 2011


After running RTA at 1000C, there is some silvery-colored residue on some portion of the wafer backside.  What is causing this?  The wafer only had Si, SiO2, and SiN.




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