Problem aw610_l SNF 2011-02-07 22:16:09: Residue on wafer backside

emyers at snf.stanford.edu emyers at snf.stanford.edu
Fri Feb 11 13:05:11 PST 2011


I talked with the lab member.  It happened on one wafer and not on his following lots.  Inherently there is not anything in the chamber which can cause these problems.  High temperatures can highlight artifacts ono wafers.  The root cause remains unknown.




More information about the aw610_l-pcs mailing list