From emyers at snf.stanford.edu Fri Jun 3 12:28:36 2011 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 3 Jun 2011 12:28:36 -0700 Subject: Problem aw610_l SNF 2011-06-03 12:28:35: Needs Qualification Message-ID: System has not been calibrated following chamber wet clean. From emyers at snf.stanford.edu Fri Jun 3 12:29:17 2011 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 3 Jun 2011 12:29:17 -0700 Subject: Shutdown aw610_l SNF 2011-05-19 10:04:12: Requires Chamber Clean Message-ID: Chamber was removed and wet cleaned. System needs calibration and qualification. From jasonlin at snf.stanford.edu Fri Jun 3 22:31:43 2011 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Fri, 3 Jun 2011 22:31:43 -0700 Subject: Comment aw610_l SNF 2011-06-03 22:31:42: Qual1150 Results Message-ID: 5 diff cleaned wafers, QUAL1150 recipe 9 point measurement on woollam 1: Mean 121.9A, Std Dev 2.4 2: Mean 123.7A, Std Dev 2.0 3: Mean 127.5A, Std Dev 1.9 4: Mean 126.3A, Std Dev 4.0 5: Mean 123.8A, Std Dev 1.9 From uli at snf.stanford.edu Thu Jun 23 17:43:23 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Thu, 23 Jun 2011 17:43:23 -0700 Subject: Shutdown aw610_l SNF 2011-06-23 17:43:23: after two wafers: Message-ID: tray and chamber has brown film From emyers at snf.stanford.edu Mon Jun 27 15:06:05 2011 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 27 Jun 2011 15:06:05 -0700 Subject: Problem aw610_l SNF 2011-06-27 15:06:05: Chamber Cleanliness Message-ID: The chamber is getting coated. It's not to the point of pull and clean, but the deposition is noticable. From emyers at snf.stanford.edu Mon Jun 27 15:06:59 2011 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 27 Jun 2011 15:06:59 -0700 Subject: Shutdown aw610_l SNF 2011-06-23 17:43:23: after two wafers: Message-ID: The chamber does have deposition from these wafers. It's not to the point where it needs a wet clean, but it is noticable.