Comment aw610_l SNF 2011-06-03 22:31:42: Qual1150 Results

jasonlin at snf.stanford.edu jasonlin at snf.stanford.edu
Fri Jun 3 22:31:43 PDT 2011


5 diff cleaned wafers, QUAL1150 recipe
9 point measurement on woollam
1: Mean 121.9A, Std Dev 2.4
2: Mean 123.7A, Std Dev 2.0
3: Mean 127.5A, Std Dev 1.9
4: Mean 126.3A, Std Dev 4.0
5: Mean 123.8A, Std Dev 1.9




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