Shutdown aw610_l SNF 2011-06-23 17:43:23: after two wafers:
uli at snf.stanford.edu
uli at snf.stanford.edu
Thu Jun 23 17:43:23 PDT 2011
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Comment aw610_l SNF 2011-06-03 22:31:42: Qual1150 Results
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Shutdown aw610_l SNF 2011-06-23 17:43:23: after two wafers:
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tray and chamber has brown film
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Comment aw610_l SNF 2011-06-03 22:31:42: Qual1150 Results
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Shutdown aw610_l SNF 2011-06-23 17:43:23: after two wafers:
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