Shutdown aw610_l SNF 2011-06-23 17:43:23: after two wafers:

emyers at snf.stanford.edu emyers at snf.stanford.edu
Mon Jun 27 15:06:59 PDT 2011


The chamber does have deposition from these wafers.  It's not to the point where it needs a wet clean, but it is noticable.




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