From cbaxter at snf.stanford.edu  Fri Mar  2 15:38:29 2012
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Fri, 2 Mar 2012 15:38:29 -0800
Subject: Shutdown aw610_l SNF 2011-12-12 15:49:44: pre shut down gas line purge
Message-ID: <mailman.50.1356281070.3414.aw610_l-pcs@snf.stanford.edu>

System ready..



From jhaydon at snf.stanford.edu  Tue Mar  6 08:04:34 2012
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Tue, 6 Mar 2012 08:04:34 -0800
Subject: Problem aw610_l SNF 2011-12-12 15:35:24: no NH3
Message-ID: <mailman.51.1356281070.3414.aw610_l-pcs@snf.stanford.edu>

NH3 now available



From daesung at snf.stanford.edu  Tue Mar 13 19:50:48 2012
From: daesung at snf.stanford.edu (daesung at snf.stanford.edu)
Date: Tue, 13 Mar 2012 19:50:48 -0700
Subject: Problem aw610_l SNF 2012-03-13 19:50:47: No water message.
Message-ID: <mailman.52.1356281070.3414.aw610_l-pcs@snf.stanford.edu>




From emyers at snf.stanford.edu  Tue Mar 13 21:04:22 2012
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Tue, 13 Mar 2012 21:04:22 -0700
Subject: Shutdown aw610_l SNF 2012-03-13 21:04:22: water leak
Message-ID: <mailman.53.1356281070.3414.aw610_l-pcs@snf.stanford.edu>




From jhaydon at snf.stanford.edu  Wed Mar 14 11:11:15 2012
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Wed, 14 Mar 2012 11:11:15 -0700
Subject: Shutdown aw610_l SNF 2012-03-13 21:04:22: water leak
Message-ID: <mailman.54.1356281070.3414.aw610_l-pcs@snf.stanford.edu>

leak repaired



From jhaydon at snf.stanford.edu  Wed Mar 14 11:11:55 2012
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Wed, 14 Mar 2012 11:11:55 -0700
Subject: Problem aw610_l SNF 2012-03-13 19:50:47: No water message.
Message-ID: <mailman.55.1356281070.3414.aw610_l-pcs@snf.stanford.edu>

leak repaired



From daesung at snf.stanford.edu  Wed Mar 21 16:33:46 2012
From: daesung at snf.stanford.edu (daesung at snf.stanford.edu)
Date: Wed, 21 Mar 2012 16:33:46 -0700
Subject: Problem aw610_l SNF 2012-03-21 16:33:46: Brown residue
Message-ID: <mailman.56.1356281070.3414.aw610_l-pcs@snf.stanford.edu>

Large brown residue on the quartz tray and on the wafer tray after RTA.



From jhaydon at snf.stanford.edu  Thu Mar 22 13:35:27 2012
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Thu, 22 Mar 2012 13:35:27 -0700
Subject: Shutdown aw610_l SNF 2012-03-22 13:35:27: down for contamination 
Message-ID: <mailman.57.1356281070.3414.aw610_l-pcs@snf.stanford.edu>

Chamber will be cleaned tomorrow



From cbaxter at snf.stanford.edu  Tue Mar 27 15:14:53 2012
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Tue, 27 Mar 2012 15:14:53 -0700
Subject: Comment aw610_l SNF 2012-03-27 15:14:53: O-ring
Message-ID: <mailman.58.1356281070.3414.aw610_l-pcs@snf.stanford.edu>

Will get the right size o-ring tomorrow..