From emyers at snf.stanford.edu Mon Oct 11 09:09:41 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 11 Oct 2010 09:09:41 -0700 Subject: Problem aw610_r SNF 2010-09-21 15:41:47: Released on per person basis Message-ID: System released to the lab community From emyers at snf.stanford.edu Mon Oct 11 09:38:38 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 11 Oct 2010 09:38:38 -0700 Subject: Shutdown aw610_r SNF 2010-10-11 09:38:38: Water Flow Message-ID: Water flow is half of what it was last week and it's discoloured. From emyers at snf.stanford.edu Tue Oct 12 10:24:25 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Tue, 12 Oct 2010 10:24:25 -0700 Subject: Comment aw610_r SNF 2010-10-12 10:24:24: Repair Update, 10/12/10 Message-ID: I talked with Jim regarding our water flow problems. The chiller which we bought for the systems failed. As a result of the contamination we need to replace the water supply and return lines along with the flow meters and install a filter. Jim will also be ordering replacement pumps (which could take a week). After the water lines have been replace, we will test the old pumps and see if we can get the system functional in the short term. From emyers at snf.stanford.edu Mon Oct 18 08:30:42 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 18 Oct 2010 08:30:42 -0700 Subject: Comment aw610_r SNF 2010-10-12 10:24:24: Repair Update, 10/12/10 Message-ID: Jim, cleaned up the chiller and replaced water supply lines with larger diameter tubing. Systems are available once again. From emyers at snf.stanford.edu Mon Oct 18 08:30:49 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 18 Oct 2010 08:30:49 -0700 Subject: Shutdown aw610_r SNF 2010-10-11 09:38:38: Water Flow Message-ID: Jim, cleaned up the chiller and replaced water supply lines with larger diameter tubing. Systems are available once again. From suyog at snf.stanford.edu Mon Oct 18 17:58:05 2010 From: suyog at snf.stanford.edu (suyog at snf.stanford.edu) Date: Mon, 18 Oct 2010 17:58:05 -0700 Subject: Problem aw610_r SNF 2010-10-18 17:58:05: Slow ramp down Message-ID: Temperature ramp down is significantly slower compared to what it was before shutdown. Equipment is taking long time to come down to below 300C. From hdonglee at snf.stanford.edu Wed Oct 20 09:44:07 2010 From: hdonglee at snf.stanford.edu (hdonglee at snf.stanford.edu) Date: Wed, 20 Oct 2010 09:44:07 -0700 Subject: Problem aw610_r SNF 2010-10-20 09:44:06: operation is stopped Message-ID: After saving my process file, I clicked different "Lot ID" to check my files while the RTA was still cooling down to RT. At that time, I could not operate it. It looks like RTA operation(cooling) was stopped at the temperature of 27. And, command line of DOS showed up. From emyers at snf.stanford.edu Thu Oct 21 09:11:56 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Thu, 21 Oct 2010 09:11:56 -0700 Subject: Problem aw610_r SNF 2010-10-20 09:44:06: operation is stopped Message-ID: Operating system OK this morning. The software does stop tracking temperature most of the time when you change screens. A simple computer reboot can reinitallize the software. From emyers at snf.stanford.edu Thu Oct 21 13:50:58 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Thu, 21 Oct 2010 13:50:58 -0700 Subject: Problem aw610_r SNF 2010-10-18 17:58:05: Slow ramp down Message-ID: I can not see any indication of this problem. If you leave the process screen before it run is completed, they system stops updating the front LED. From the hardware side there is nothing which would cause a slow ramp. All the parameters I know of would be contained in the recipe (ramp down step or no chamber gas flow). From horvath at snf.stanford.edu Thu Oct 21 16:03:44 2010 From: horvath at snf.stanford.edu (horvath at snf.stanford.edu) Date: Thu, 21 Oct 2010 16:03:44 -0700 Subject: Comment aw610_r SNF 2010-10-21 16:03:43: alarm code 7 Message-ID: I got this message "alarm code 7" three times while running a recipe at 700C (w/ TC). Problem did not appear while running lower temperature recipes. Not certain if this is because of the recipe or the TC... I checked the TC and it seems to be intact, no loose connection. From tasyurek at snf.stanford.edu Wed Oct 27 15:53:47 2010 From: tasyurek at snf.stanford.edu (tasyurek at snf.stanford.edu) Date: Wed, 27 Oct 2010 15:53:47 -0700 Subject: Shutdown aw610_r SNF 2010-10-27 15:53:47: Pieces in the system Message-ID: My pieces flew off the wafer and Ed told me to shut the tool down. From eenriquez at snf.stanford.edu Fri Oct 29 11:51:49 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 29 Oct 2010 11:51:49 -0700 Subject: Shutdown aw610_r SNF 2010-10-27 15:53:47: Pieces in the system Message-ID: Removed piece of wafer from the chamber. From eenriquez at snf.stanford.edu Fri Oct 29 11:58:46 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 29 Oct 2010 11:58:46 -0700 Subject: Comment aw610_r SNF 2010-10-29 11:58:46: Converted to pyrometer operation Message-ID: Removed the TC and changed the MAX operating temperature to 1250 C.