Comment aw610_r SNF 2011-06-12 13:00:24: Carrier wafers
emyers at snf.stanford.edu
emyers at snf.stanford.edu
Tue Jul 5 14:11:06 PDT 2011
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Comment aw610_r SNF 2011-05-31 17:25:07: quartz support looks dirty
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Carrier wafer disposed of and the chamber was cleaned
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Comment aw610_r SNF 2011-05-31 17:25:07: quartz support looks dirty
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