Shutdown aw610_r SNF 2011-06-01 15:39:52: Brown residue all over

nxs4059 at snf.stanford.edu nxs4059 at snf.stanford.edu
Wed Jun 1 15:39:52 PDT 2011


There is a brown residue all over the interior of the chamber and on the wafer holder.  Looks like somebody burned something in it...  needs to be cleaned.  




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