Comment aw610_r SNF 2011-06-06 18:11:15: QUAL1150 Results

jasonlin at snf.stanford.edu jasonlin at snf.stanford.edu
Mon Jun 6 18:11:16 PDT 2011


5 diff cleaned wafers, QUAL1150 recipe
9 point measurement on woollam
1: Mean 122.8A, Std Dev 2.2
2: Mean 124.4A, Std Dev 2.8
3: Mean 122.5A, Std Dev 2.5
4: Mean 126.1A, Std Dev 2.8
5: Mean 125.3A, Std Dev 3.9




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