Shutdown aw610_r SNF 2011-06-28 10:37:48: wafer flaked inside chamber

ryhuang at snf.stanford.edu ryhuang at snf.stanford.edu
Tue Jun 28 10:37:48 PDT 2011

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Quartzware and possibly chamber need cleaning.  While running a 675C anneal, surface film (Ti) flaked off from part of the wafer.

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