From alsune at snf.stanford.edu  Tue Mar  1 00:11:13 2011
From: alsune at snf.stanford.edu (alsune at snf.stanford.edu)
Date: Tue, 1 Mar 2011 00:11:13 -0800
Subject: Problem aw610_r SNF 2011-03-01 00:11:13: Two samples fall off the dummy wafer while processing
Message-ID: <mailman.46.1356281079.3429.aw610_r-pcs@snf.stanford.edu>

During annealing 4 small Epi-Ge sample on a dummy  wafer in the chamber, the 2 fall off from the wafer. Recommend not using the system until the sample is recovered.



From alsune at snf.stanford.edu  Tue Mar  1 11:42:52 2011
From: alsune at snf.stanford.edu (alsune at snf.stanford.edu)
Date: Tue, 1 Mar 2011 11:42:52 -0800
Subject: Shutdown aw610_r SNF 2011-03-01 11:42:52: Two samples fall off the dummy wafer while processing
Message-ID: <mailman.47.1356281079.3429.aw610_r-pcs@snf.stanford.edu>

Two sample were lost during anneal process. Recommend not to use the system until the sample piece is removed or recovered from the system.



From emyers at snf.stanford.edu  Thu Mar  3 13:33:36 2011
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Thu, 3 Mar 2011 13:33:36 -0800
Subject: Problem aw610_r SNF 2011-03-01 00:11:13: Two samples fall off the dummy wafer while processing
Message-ID: <mailman.48.1356281079.3429.aw610_r-pcs@snf.stanford.edu>

removed two pieces from the chamber.  Verified TC was reconnected



From emyers at snf.stanford.edu  Thu Mar  3 13:33:46 2011
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Thu, 3 Mar 2011 13:33:46 -0800
Subject: Shutdown aw610_r SNF 2011-03-01 11:42:52: Two samples fall off the dummy wafer while processing
Message-ID: <mailman.49.1356281079.3429.aw610_r-pcs@snf.stanford.edu>

removed two pieces from the chamber.  Verified TC was reconnected



From seymour at snf.stanford.edu  Mon Mar 21 09:48:37 2011
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Mon, 21 Mar 2011 09:48:37 -0700
Subject: Problem aw610_r SNF 2011-03-21 09:48:36: forming gas empty
Message-ID: <mailman.50.1356281079.3429.aw610_r-pcs@snf.stanford.edu>




From tberg at snf.stanford.edu  Thu Mar 24 13:09:36 2011
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Thu, 24 Mar 2011 13:09:36 -0700
Subject: Problem aw610_r SNF 2011-03-21 09:48:36: forming gas empty
Message-ID: <mailman.51.1356281079.3429.aw610_r-pcs@snf.stanford.edu>

FGA passed leak test it is back on now



From horvath at snf.stanford.edu  Fri Mar 25 12:33:02 2011
From: horvath at snf.stanford.edu (horvath at snf.stanford.edu)
Date: Fri, 25 Mar 2011 12:33:02 -0700
Subject: Problem aw610_r SNF 2011-03-25 12:33:01: No N2O flow
Message-ID: <mailman.52.1356281079.3429.aw610_r-pcs@snf.stanford.edu>

No N2O flow while running process recipe (T-QS600A).
Attila



From emyers at snf.stanford.edu  Fri Mar 25 14:00:36 2011
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Fri, 25 Mar 2011 14:00:36 -0700
Subject: Problem aw610_r SNF 2011-03-25 12:33:01: No N2O flow
Message-ID: <mailman.53.1356281079.3429.aw610_r-pcs@snf.stanford.edu>

Found the shut-off valve behind the STS PECVD where they cut in to the N2O line turned off.  Keeping track of this gas distribution design will be a challenge.
Flowed 5 slpm of N2O in manual and the MFC responded correctly.