Problem aw610_r SNF 2011-03-01 00:11:13: Two samples fall off the dummy wafer while processing

alsune at alsune at
Tue Mar 1 00:11:13 PST 2011

During annealing 4 small Epi-Ge sample on a dummy  wafer in the chamber, the 2 fall off from the wafer. Recommend not using the system until the sample is recovered.

More information about the aw610_r-pcs mailing list