Problem aw610_r SNF 2011-03-01 00:11:13: Two samples fall off the dummy wafer while processing

alsune at snf.stanford.edu alsune at snf.stanford.edu
Tue Mar 1 00:11:13 PST 2011


During annealing 4 small Epi-Ge sample on a dummy  wafer in the chamber, the 2 fall off from the wafer. Recommend not using the system until the sample is recovered.




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