Shutdown aw610_r SNF 2011-03-01 11:42:52: Two samples fall off the dummy wafer while processing
emyers at snf.stanford.edu
emyers at snf.stanford.edu
Thu Mar 3 13:33:46 PST 2011
removed two pieces from the chamber. Verified TC was reconnected
More information about the aw610_r-pcs
mailing list