Problem aw610_r SNF 2011-03-25 12:33:01: No N2O flow

emyers at snf.stanford.edu emyers at snf.stanford.edu
Fri Mar 25 14:00:36 PDT 2011


Found the shut-off valve behind the STS PECVD where they cut in to the N2O line turned off.  Keeping track of this gas distribution design will be a challenge.
Flowed 5 slpm of N2O in manual and the MFC responded correctly.




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