From apal at snf.stanford.edu Fri Nov 4 02:02:28 2011 From: apal at snf.stanford.edu (apal at snf.stanford.edu) Date: Fri, 4 Nov 2011 02:02:28 -0700 Subject: Shutdown aw610_r SNF 2011-11-04 02:02:28: Dummy Wafer Broke inside the chamber Message-ID: My dummy wafer came out broken when I was doing a test run at 550C temperature. I got the full wafer back but the temperature is not showing and the gas flow is still continuing. From apal at snf.stanford.edu Fri Nov 4 02:03:22 2011 From: apal at snf.stanford.edu (apal at snf.stanford.edu) Date: Fri, 4 Nov 2011 02:03:22 -0700 Subject: Shutdown aw610_r SNF 2011-11-04 02:03:22: Message-ID: From jhaydon at snf.stanford.edu Fri Nov 4 07:23:04 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 4 Nov 2011 07:23:04 -0700 Subject: Shutdown aw610_r SNF 2011-11-04 02:03:22: Message-ID: From emyers at snf.stanford.edu Fri Nov 4 14:39:02 2011 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 4 Nov 2011 14:39:02 -0700 Subject: Shutdown aw610_r SNF 2011-11-04 14:39:02: TC Failed Message-ID: The wires on the TC Melted. Appears somehow the wires got twisted and melted . From emyers at snf.stanford.edu Mon Nov 7 15:11:57 2011 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 7 Nov 2011 15:11:57 -0800 Subject: Shutdown aw610_r SNF 2011-11-04 14:39:02: TC Failed Message-ID: Took out TC running in Pyro Mode From emyers at snf.stanford.edu Mon Nov 7 15:12:03 2011 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 7 Nov 2011 15:12:03 -0800 Subject: Shutdown aw610_r SNF 2011-11-04 02:02:28: Dummy Wafer Broke inside the chamber Message-ID: Took out TC running in Pyro Mode From emyers at snf.stanford.edu Mon Nov 7 15:12:40 2011 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 7 Nov 2011 15:12:40 -0800 Subject: Problem aw610_r SNF 2011-11-07 15:12:39: Pyro Mode Message-ID: Took out broken TDC and will run in Pyro mode until new TC arrives From suyog at snf.stanford.edu Mon Nov 7 15:54:29 2011 From: suyog at snf.stanford.edu (suyog at snf.stanford.edu) Date: Mon, 7 Nov 2011 15:54:29 -0800 Subject: Problem aw610_r SNF 2011-11-07 15:54:29: No gas flow, lamp not on Message-ID: System gives error : error code 725 - lamp not on. From wslee at snf.stanford.edu Tue Nov 8 16:47:58 2011 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Tue, 8 Nov 2011 16:47:58 -0800 Subject: Problem aw610_r SNF 2011-11-08 16:47:58: no gas flow, lamp is off Message-ID: same error as the user reported above. There is a lamp LED that is lit for the aw610_l but is not lit for the aw610_r. The tool does not seem useable in its current stat but I will not shut it down in case someone can use it. From emyers at snf.stanford.edu Wed Nov 9 08:45:08 2011 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 9 Nov 2011 08:45:08 -0800 Subject: Shutdown aw610_r SNF 2011-11-09 08:45:07: Interlock Problem Message-ID: The system is behaving like there is an iterlock failure. I see similar responses when it's not enabled. I also noticed the top cover interlock does not seem to function as designed. I've asked Jim Haydon to look at the interlocks From emyers at snf.stanford.edu Wed Nov 9 08:45:30 2011 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 9 Nov 2011 08:45:30 -0800 Subject: Comment aw610_r SNF 2011-09-07 09:20:22: TC Error repot Message-ID: archived From emyers at snf.stanford.edu Wed Nov 9 08:45:40 2011 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 9 Nov 2011 08:45:40 -0800 Subject: Comment aw610_r SNF 2011-09-07 14:50:15: TC reading seems to be okay Message-ID: archived From emyers at snf.stanford.edu Wed Nov 9 08:46:34 2011 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 9 Nov 2011 08:46:34 -0800 Subject: Comment aw610_r SNF 2011-10-20 16:36:08: TC stops reading when process ends Message-ID: The system does stop updating temperature readings when a recipe is completed until this window is closed From emyers at snf.stanford.edu Wed Nov 9 08:47:19 2011 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 9 Nov 2011 08:47:19 -0800 Subject: Problem aw610_r SNF 2011-11-07 15:54:29: No gas flow, lamp not on Message-ID: Noted. Could be an interlock problem. I moved this problem to a shutdown. From emyers at snf.stanford.edu Wed Nov 9 08:47:29 2011 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 9 Nov 2011 08:47:29 -0800 Subject: Problem aw610_r SNF 2011-11-08 16:47:58: no gas flow, lamp is off Message-ID: Noted. Could be an interlock problem. I moved this problem to a shutdown. From jhaydon at snf.stanford.edu Wed Nov 9 11:36:14 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 9 Nov 2011 11:36:14 -0800 Subject: Shutdown aw610_r SNF 2011-11-09 08:45:07: Interlock Problem Message-ID: EPO was pushed in tested and worked From aditya at snf.stanford.edu Wed Nov 9 15:45:02 2011 From: aditya at snf.stanford.edu (aditya at snf.stanford.edu) Date: Wed, 9 Nov 2011 15:45:02 -0800 Subject: Problem aw610_r SNF 2011-11-09 15:45:01: wafer_lamp.sys Message-ID: unable to use any pyrometer based recipes--complains of wrong wafer_lamp.sys file From emyers at snf.stanford.edu Wed Nov 9 16:12:40 2011 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 9 Nov 2011 16:12:40 -0800 Subject: Shutdown aw610_r SNF 2011-11-09 16:12:39: Still seeing the same error Message-ID: From eenriquez at snf.stanford.edu Wed Nov 9 19:28:43 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 9 Nov 2011 19:28:43 -0800 Subject: Shutdown aw610_r SNF 2011-11-09 16:12:39: Still seeing the same error Message-ID: Reloaded the system setup after toggling the Pyrometer software/hardware button. Ran in auto 2 x with no problems. From jhaydon at snf.stanford.edu Thu Nov 10 11:11:21 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 10 Nov 2011 11:11:21 -0800 Subject: Problem aw610_r SNF 2011-11-09 15:45:01: wafer_lamp.sys Message-ID: tested this morning and was working From emyers at snf.stanford.edu Fri Nov 11 14:31:55 2011 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 11 Nov 2011 14:31:55 -0800 Subject: Problem aw610_r SNF 2011-11-07 15:12:39: Pyro Mode Message-ID: Installed new TC From emyers at snf.stanford.edu Fri Nov 11 14:32:07 2011 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 11 Nov 2011 14:32:07 -0800 Subject: Comment aw610_r SNF 2011-11-11 14:32:07: TC Mode Message-ID: From hailin at snf.stanford.edu Tue Nov 15 11:40:32 2011 From: hailin at snf.stanford.edu (hailin at snf.stanford.edu) Date: Tue, 15 Nov 2011 11:40:32 -0800 Subject: Shutdown aw610_r SNF 2011-11-15 11:40:32: wafer fell off Message-ID: From maurice at snf.stanford.edu Thu Nov 17 11:21:35 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 17 Nov 2011 11:21:35 -0800 Subject: Shutdown aw610_r SNF 2011-11-15 11:40:32: wafer fell off Message-ID: removed From emyers at snf.stanford.edu Mon Nov 21 08:19:26 2011 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 21 Nov 2011 08:19:26 -0800 Subject: Comment aw610_r SNF 2011-11-21 08:19:25: Pyrometer Mode Monday 11/21/11 Message-ID: From emyers at snf.stanford.edu Mon Nov 21 08:19:38 2011 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 21 Nov 2011 08:19:38 -0800 Subject: Comment aw610_r SNF 2011-11-11 14:32:07: TC Mode Message-ID: archived From emyers at snf.stanford.edu Tue Nov 22 07:52:14 2011 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Tue, 22 Nov 2011 07:52:14 -0800 Subject: Shutdown aw610_r SNF 2011-11-22 07:52:14: Needs a clean Message-ID: From jhaydon at snf.stanford.edu Tue Nov 22 13:35:41 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 22 Nov 2011 13:35:41 -0800 Subject: Shutdown aw610_r SNF 2011-11-22 07:52:14: Needs a clean Message-ID: parts have been cleaned From jhaydon at snf.stanford.edu Tue Nov 22 13:36:51 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 22 Nov 2011 13:36:51 -0800 Subject: Shutdown aw610_r SNF 2011-11-22 13:36:50: Ed will realse the tool after instalation of temp probe Message-ID: From emyers at snf.stanford.edu Tue Nov 22 15:10:09 2011 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Tue, 22 Nov 2011 15:10:09 -0800 Subject: Shutdown aw610_r SNF 2011-11-22 13:36:50: Ed will realse the tool after instalation of temp probe Message-ID: The si pieces were removed from the chamber and quartz tray was wet cleaned and the TC was installed From emyers at snf.stanford.edu Tue Nov 22 15:11:08 2011 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Tue, 22 Nov 2011 15:11:08 -0800 Subject: Comment aw610_r SNF 2011-11-21 08:19:25: Pyrometer Mode Monday 11/21/11 Message-ID: switched back to TC after quartz tray was cleaned From eenriquez at snf.stanford.edu Tue Nov 29 14:03:16 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 29 Nov 2011 14:03:16 -0800 Subject: Comment aw610_r SNF 2011-11-29 14:03:15: Now setup for pyrometer Message-ID: From jimkruger at snf.stanford.edu Tue Nov 29 21:42:40 2011 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Tue, 29 Nov 2011 21:42:40 -0800 Subject: Comment aw610_r SNF 2011-11-29 21:42:40: Plan to switch back from pyro to TC late afternoon on Wed, 11-30-11 Message-ID: From wslee at snf.stanford.edu Wed Nov 30 03:41:14 2011 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Wed, 30 Nov 2011 03:41:14 -0800 Subject: Problem aw610_r SNF 2011-11-30 03:41:14: handle connection loose Message-ID: The handle seems loose on the left side. From mdickey at snf.stanford.edu Wed Nov 30 06:28:54 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 30 Nov 2011 06:28:54 -0800 Subject: Shutdown aw610_r SNF 2011-11-30 06:28:53: water leak Message-ID: Water leak at tool