Shutdown aw610_r SNF 2012-10-18 10:55:13: Need Quartz Clean

emyers at emyers at
Sun Dec 23 08:44:40 PST 2012

In addition to a contaminated chamber, someone appears to have melted their glove on the wafer tray.  Instead of making a note of it on Coral they decided to scratch it off.  If anyone know who it is, I would like to talk with them

More information about the aw610_r-pcs mailing list