From jhaydon at stanford.edu Mon Jan 14 14:48:24 2013 From: jhaydon at stanford.edu (jhaydon at stanford.edu) Date: Mon, 14 Jan 2013 14:48:24 -0800 (PST) Subject: [aw610_r-pcs] Shutdown aw610_r SNF 2013-01-14 14:48:23: water leak Message-ID: <12349885.24.1358203704296.JavaMail.coral@snc-coraldb.stanford.edu> From jhaydon at stanford.edu Mon Jan 14 15:02:35 2013 From: jhaydon at stanford.edu (jhaydon at stanford.edu) Date: Mon, 14 Jan 2013 15:02:35 -0800 (PST) Subject: [aw610_r-pcs] Comment aw610_r SNF 2013-01-14 15:02:35: many melted and over heated parts and wafer bits left in chamber Message-ID: <19365882.25.1358204555980.JavaMail.coral@snc-coraldb.stanford.edu> This tool will be down for a while. A week maybe more From jhaydon at stanford.edu Mon Jan 28 07:22:30 2013 From: jhaydon at stanford.edu (jhaydon at stanford.edu) Date: Mon, 28 Jan 2013 07:22:30 -0800 (PST) Subject: [aw610_r-pcs] Comment aw610_r SNF 2013-01-28 07:22:29: Parts have been ordered but onme is on back order Message-ID: <7298819.28.1359386550466.JavaMail.coral@snc-coraldb.stanford.edu> It is still at least a week out