[aw610_r-pcs] Comment aw610_r SNF 2013-01-14 15:02:35: many melted and over heated parts and wafer bits left in chamber

jhaydon at stanford.edu jhaydon at stanford.edu
Mon Jan 14 15:02:35 PST 2013

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This tool will be down for a while. A week maybe more

Previous message: [aw610_r-pcs] Shutdown aw610_r SNF 2013-01-14 14:48:23: water leak
Next message: [aw610_r-pcs] Comment aw610_r SNF 2013-01-28 07:22:29: Parts have been ordered but onme is on back order
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