[aw610_r-pcs] Problem aw610_r SNF 2013-05-05 02:04:09: Temperature fluctuation and TC mode issues

apal at stanford.edu apal at stanford.edu
Sun May 5 02:04:09 PDT 2013


I was using the 400C recipe. For first two runs, the temperature during steaty state were fluctuating slightly (~20C) . Then during the 3rd run, the temperature went above 700C and asked me to stop the recipe. 
I sincerely hope somebody will look into this and the tool would be back to running condition soon.


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