[aw610_r-pcs] Problem aw610_r SNF 2013-05-05 02:04:09: Temperature fluctuation and TC mode issues

maurice at stanford.edu maurice at stanford.edu
Mon May 6 14:31:41 PDT 2013


Jim and I adjusted the TC (where it hit the back of the wafer) and ran the 400c recipe 4 times.  It didn't vary more than 2 degrees.  
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Please report if anyone sees variations in the future.


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