From tholme at stanford.edu  Thu Aug  4 13:53:30 2011
From: tholme at stanford.edu (Tim Holme)
Date: Thu, 4 Aug 2011 13:53:30 -0700 (PDT)
Subject: SiO2 thermal oxidation recipes
In-Reply-To: <709395896.514000.1312491207628.JavaMail.root@zm06.stanford.edu>
Message-ID: <1646461254.514004.1312491210737.JavaMail.root@zm06.stanford.edu>

I'll be needing to make some thermal SiO2.  This may mean that I'd like to use the pyrometer, but I thought I'd ask about other people's experiences with low temperature oxidation.

I've seen the calibration/qualification report for oxidation on AW610-r at 1150C.  Does anyone have a recipe for lower temperatures that doesn't use the pyrometer?  Does anyone know a comparison of electrical properties of oxides grown at different temperatures?  If I can get a calibrated growth rate at low temp and good electrical properties, I'll be a happy camper.  Otherwise, I'd like to request a pyrometer use day.

Thanks all,
Tim


From tholme at stanford.edu  Fri Aug  5 17:33:49 2011
From: tholme at stanford.edu (Tim Holme)
Date: Fri, 5 Aug 2011 17:33:49 -0700 (PDT)
Subject: SiO2 thermal oxidation recipes
In-Reply-To: <1646461254.514004.1312491210737.JavaMail.root@zm06.stanford.edu>
Message-ID: <483379837.550193.1312590829304.JavaMail.root@zm06.stanford.edu>

I'd like to request next Wed as a pyrometer use day.

----- Original Message -----
From: "Tim Holme" <tholme at stanford.edu>
To: "aw610 r" <aw610_r at snf.stanford.edu>
Sent: Thursday, August 4, 2011 1:53:30 PM
Subject: SiO2 thermal oxidation recipes

I'll be needing to make some thermal SiO2.  This may mean that I'd like to use the pyrometer, but I thought I'd ask about other people's experiences with low temperature oxidation.

I've seen the calibration/qualification report for oxidation on AW610-r at 1150C.  Does anyone have a recipe for lower temperatures that doesn't use the pyrometer?  Does anyone know a comparison of electrical properties of oxides grown at different temperatures?  If I can get a calibrated growth rate at low temp and good electrical properties, I'll be a happy camper.  Otherwise, I'd like to request a pyrometer use day.

Thanks all,
Tim


From tholme at stanford.edu  Wed Aug 10 09:21:57 2011
From: tholme at stanford.edu (Tim Holme)
Date: Wed, 10 Aug 2011 09:21:57 -0700 (PDT)
Subject: pyrometer use day
In-Reply-To: <1543865798.276404.1309195536948.JavaMail.root@zm06.stanford.edu>
Message-ID: <2108068929.639473.1312993317744.JavaMail.root@zm06.stanford.edu>

Looks like the TC is still installed today.  I'm removing my reservation unless Ed can come in soon to switch out to the pyrometer.

Tim

----- Original Message -----
From: "Tim Holme" <tholme at stanford.edu>
To: "aw610 r" <aw610_r at snf.stanford.edu>
Sent: Monday, June 27, 2011 10:25:36 AM
Subject: pyrometer use day

I'd like to be able to use the pyrometer to go to higher temperatures, can I request a day?  Does anyone else have the same request and want to join me for a day?

I guess tomorrow is too soon--how about Wed?

Thanks,
Tim


From rfasch at stanford.edu  Fri Aug 26 16:16:46 2011
From: rfasch at stanford.edu (Rainer Fasching)
Date: Fri, 26 Aug 2011 16:16:46 -0700
Subject: RTA non clean
In-Reply-To: <6.2.5.6.2.20110826074936.02a75c60@stanford.edu>
Message-ID: <CA7D7604.63FD%rfasch@gmail.com>

Ed:

Let me know the date when the tool is ready to use in high temperature
mode - so I can reserve it accordingly - RF.

On 8/26/11 7:54 AM, "Ed Myers" <edmyers at stanford.edu> wrote:

>Rainer,
>
>The request to send the email out to the community was to help access
>the resources of the community and not solely depend on me.  If you
>don't want take this approach which tries to short cut my project
>list and fall in to my on-going priority list for my job and my other
>600 customer, we can also do it that way if you want.
>
>Ed
>
>At 09:45 PM 8/25/2011, Rainer Fasching wrote:
>>Ed:
>>
>>You are the person responsible for this tool and I would expect you to
>>just forward the request. Please be aware that I am your customer. Let me
>>know when the tool will be ready.
>>
>>Rainer Fasching
>>Con. Associate Professor
>>Mechanical Engineering
>>Stanford University
>>
>>
>>On 8/25/11 1:49 PM, "Ed Myers" <edmyers at stanford.edu> wrote:
>>
>> >Rainer,
>> >
>> >This request needs to be made to the aw610_r
>> >community and not to me.  Everyone needs to see
>> >the request for a few days so they can also take advantage of the
>>change
>> >over.
>> >
>> >Regards,
>> >Ed
>> >
>> >
>> >At 11:32 AM 8/25/2011, Rainer Fasching wrote:
>> >>He Ed:
>> >>
>> >>We would need the RTA non clean in high
>> >>temperature mode ? ideally tomorrow Friday or on
>> >>Monday. Please let me know if this can be done so I can reserve it
>> >>accordingly.
>> >>
>> >>Thanks,
>> >>Rainer
>> >
>> >
>
>




From chienyuc at stanford.edu  Fri Aug 26 18:49:12 2011
From: chienyuc at stanford.edu (Chien-Yu Chen)
Date: Fri, 26 Aug 2011 18:49:12 -0700 (PDT)
Subject: RTA non clean
In-Reply-To: <CA7D7604.63FD%rfasch@gmail.com>
Message-ID: <297084545.875869.1314409752632.JavaMail.root@zm03.stanford.edu>

Hi,

I would like to reserve slots of pyro use as well.  Monday or sometime next week will be fine.

Thanks,
Chien-Yu
----- Original Message -----
From: "Rainer Fasching" <rfasch at stanford.edu>
To: "Ed Myers" <edmyers at stanford.edu>
Cc: "Tim Holme" <THolme at quantumscape.com>, "aw610 r" <aw610_r at snf.stanford.edu>
Sent: 2011?8?26? ??? 16:16:46
Subject: Re: RTA non clean

Ed:

Let me know the date when the tool is ready to use in high temperature
mode - so I can reserve it accordingly - RF.

On 8/26/11 7:54 AM, "Ed Myers" <edmyers at stanford.edu> wrote:

>Rainer,
>
>The request to send the email out to the community was to help access
>the resources of the community and not solely depend on me.  If you
>don't want take this approach which tries to short cut my project
>list and fall in to my on-going priority list for my job and my other
>600 customer, we can also do it that way if you want.
>
>Ed
>
>At 09:45 PM 8/25/2011, Rainer Fasching wrote:
>>Ed:
>>
>>You are the person responsible for this tool and I would expect you to
>>just forward the request. Please be aware that I am your customer. Let me
>>know when the tool will be ready.
>>
>>Rainer Fasching
>>Con. Associate Professor
>>Mechanical Engineering
>>Stanford University
>>
>>
>>On 8/25/11 1:49 PM, "Ed Myers" <edmyers at stanford.edu> wrote:
>>
>> >Rainer,
>> >
>> >This request needs to be made to the aw610_r
>> >community and not to me.  Everyone needs to see
>> >the request for a few days so they can also take advantage of the
>>change
>> >over.
>> >
>> >Regards,
>> >Ed
>> >
>> >
>> >At 11:32 AM 8/25/2011, Rainer Fasching wrote:
>> >>He Ed:
>> >>
>> >>We would need the RTA non clean in high
>> >>temperature mode ? ideally tomorrow Friday or on
>> >>Monday. Please let me know if this can be done so I can reserve it
>> >>accordingly.
>> >>
>> >>Thanks,
>> >>Rainer
>> >
>> >
>
>


From edmyers at stanford.edu  Mon Aug 29 07:43:08 2011
From: edmyers at stanford.edu (Ed Myers)
Date: Mon, 29 Aug 2011 07:43:08 -0700
Subject: Pyro Control, Thurs. 9/1/11
Message-ID: <6.2.5.6.2.20110829074119.02aa8158@stanford.edu>

All,

I have reserved the aw610_r for pyrometer processing on Thursday, 
Sept. 1st.  I will convert the system at 8am and return it to TC 
control at 4pm.  If you need high temperature process, please sign up 
between my two reservations times.

Regards,
Ed