From sdchowdhury at transphormusa.com Fri Mar 8 18:57:59 2013 From: sdchowdhury at transphormusa.com (Saurabh Dutta Chowdhury) Date: Fri, 8 Mar 2013 18:57:59 -0800 Subject: [aw610_r] 610r change to Pyro and Pyro CAL for Monday March 10-2013 Message-ID: Jim: I am hoping Pradeep will be able to run 610r at 1120 this monday. I will be there to observe. However, talking to Pradeep it seems he needs help with Pyro CAL. Today we could not make progress as EE was out. Will EE be here on Monday for 610r. Note the recipe 1120_P worked fine in Nov-Dec but did melt the system in January so Pradeep is being extra cautious. I am assuming now that water is hooked up the tool should function fine but has anybody run a Pyro CAL already or just TC CAL? Will there be EE support on Monday. If so at what time? Say 10 AM Thanks Saurabh -------------- next part -------------- An HTML attachment was scrubbed... URL: From pradeep.nataraj at gmail.com Sat Mar 9 06:46:27 2013 From: pradeep.nataraj at gmail.com (Pradeep Nataraj) Date: Sat, 9 Mar 2013 06:46:27 -0800 Subject: [aw610_r] 610r change to Pyro and Pyro CAL for Monday March 10-2013 In-Reply-To: References: Message-ID: Saurabh, I am sorry I have NOT agreed to run your wafers especially with your process conditions on our RTP. It was just not the water problem. There is more to it. We have to calibrate our RTP for pyro first. I agree that your process recipe has worked in the past. But we have to make sure it won't damage our system again. It was very painful on us to bring it up again. Please stop referring my name Regarding RTP matter. I have not agreed to run your wafers on RTP until it is safe to do so. Also you have been very pushy on this matter! Please understand Stanford Nano lab primary usage is for students and faculty. I understand you need your work to get it done. But our staff needs to make sure it won't damage our system again. Lot of students depend on this tool. After calibration I will run your recipe with one of our staff present. If your recipe runs with stable conditions, then I will process your wafers. Please be patient until our staff permit us to do your process. If you are very desperate I can recommend other out side vendors may able to provide you this service for you. Thank you for understanding Pradeep On Mar 8, 2013, at 6:57 PM, Saurabh Dutta Chowdhury wrote: > Jim: > I am hoping Pradeep will be able to run 610r at 1120 this monday. I will be there to observe. However, talking to Pradeep it seems he needs help with Pyro CAL. Today we could not make progress as EE was out. Will EE be here on Monday for 610r. > > Note the recipe 1120_P worked fine in Nov-Dec but did melt the system in January so Pradeep is being extra cautious. > I am assuming now that water is hooked up the tool should function fine but has anybody run a Pyro CAL already or just TC CAL? > > Will there be EE support on Monday. If so at what time? Say 10 AM > > Thanks > Saurabh From sdchowdhury at transphormusa.com Sat Mar 9 08:49:41 2013 From: sdchowdhury at transphormusa.com (Saurabh) Date: Sat, 9 Mar 2013 08:49:41 -0800 Subject: [aw610_r] 610r change to Pyro and Pyro CAL for Monday March 10-2013 In-Reply-To: References: Message-ID: Pradeep No problem. I will handle this issue myself with Jim and Ed. Thx Saurabh Sent from my iPhone On Mar 9, 2013, at 6:46 AM, Pradeep Nataraj wrote: > Saurabh, > > I am sorry I have NOT agreed to run your wafers especially with your process conditions on our RTP. It was just not the water problem. There is more to it. > > We have to calibrate our RTP for pyro first. > > I agree that your process recipe has worked in the past. But we have to make sure it won't damage our system again. It was very painful on us to bring it up again. > > Please stop referring my name Regarding RTP matter. I have not agreed to run your wafers on RTP until it is safe to do so. > > Also you have been very pushy on this matter! Please understand Stanford Nano lab primary usage is for students and faculty. > > I understand you need your work to get it done. But our staff needs to make sure it won't damage our system again. Lot of students depend on this tool. > > After calibration I will run your recipe with one of our staff present. > If your recipe runs with stable conditions, then I will process your wafers. > > Please be patient until our staff permit us to do your process. > > If you are very desperate I can recommend other out side vendors may able to provide you this service for you. > > Thank you for understanding > > Pradeep > > On Mar 8, 2013, at 6:57 PM, Saurabh Dutta Chowdhury wrote: > >> Jim: >> I am hoping Pradeep will be able to run 610r at 1120 this monday. I will be there to observe. However, talking to Pradeep it seems he needs help with Pyro CAL. Today we could not make progress as EE was out. Will EE be here on Monday for 610r. >> >> Note the recipe 1120_P worked fine in Nov-Dec but did melt the system in January so Pradeep is being extra cautious. >> I am assuming now that water is hooked up the tool should function fine but has anybody run a Pyro CAL already or just TC CAL? >> >> Will there be EE support on Monday. If so at what time? Say 10 AM >> >> Thanks >> Saurabh From rc3534 at stanford.edu Tue Mar 12 21:29:01 2013 From: rc3534 at stanford.edu (Robert Chen) Date: Tue, 12 Mar 2013 21:29:01 -0700 Subject: [aw610_r] Need TC Mode for AW610R Message-ID: Is there any reason everything is still in pyro mode? My understanding is that the tool is primarily in TC mode with day exceptions for the pyrometer. If the TC setup and calibration are working, why don't we install the TC back on after pyro testing is done for the day so that it's not dead for everyone else? -------------- next part -------------- An HTML attachment was scrubbed... URL: From liyuhung at stanford.edu Mon Mar 18 10:02:07 2013 From: liyuhung at stanford.edu (Yu-Hung Li) Date: Mon, 18 Mar 2013 10:02:07 -0700 (PDT) Subject: [aw610_r] Need Pyrometer Mode for AW610R In-Reply-To: Message-ID: <641438845.7841336.1363626127623.JavaMail.root@stanford.edu> Sorry for having aw610_r switched between modes again, but could any superuser switch the system to the pyrometer mode for two days? I understand it is a very late notice, but I will be very grateful if it could be done sometime today. Many thanks! Yu-Hung From akumar10 at stanford.edu Mon Mar 18 18:04:22 2013 From: akumar10 at stanford.edu (Archana Kumar) Date: Mon, 18 Mar 2013 18:04:22 -0700 (PDT) Subject: [aw610_r] Need Pyrometer Mode for AW610R In-Reply-To: <641438845.7841336.1363626127623.JavaMail.root@stanford.edu> Message-ID: <398065774.5689541.1363655062823.JavaMail.root@stanford.edu> Hi All, I need to use pyro mode as well, but the last time I tried pyro there was a problem which I reported on coral, and I don't think it has been looked into yet. I can convert to pyro mode tomorrow, but will any of the staff be around to help us resolve the issue? Regards, Archana ----- Original Message ----- From: "Yu-Hung Li" To: "aw610 r" Sent: Monday, March 18, 2013 10:02:07 AM Subject: [aw610_r] Need Pyrometer Mode for AW610R Sorry for having aw610_r switched between modes again, but could any superuser switch the system to the pyrometer mode for two days? I understand it is a very late notice, but I will be very grateful if it could be done sometime today. Many thanks! Yu-Hung _______________________________________________ aw610_r mailing list aw610_r at snf.stanford.edu http://snf.stanford.edu/mailman/listinfo/aw610_r -------------- next part -------------- An HTML attachment was scrubbed... URL: From akumar10 at stanford.edu Tue Mar 19 16:39:18 2013 From: akumar10 at stanford.edu (Archana Kumar) Date: Tue, 19 Mar 2013 16:39:18 -0700 (PDT) Subject: [aw610_r] aw610_r back in TC mode In-Reply-To: <1204169616.6841415.1363736273137.JavaMail.root@stanford.edu> Message-ID: <1915340289.6843020.1363736358089.JavaMail.root@stanford.edu> Yu-Hung and I are done using pyro today. I've converted it back to TC for others to use. Regards, Archana -------------- next part -------------- An HTML attachment was scrubbed... URL: From akumar10 at stanford.edu Mon Mar 25 22:48:26 2013 From: akumar10 at stanford.edu (Archana Kumar) Date: Mon, 25 Mar 2013 22:48:26 -0700 (PDT) Subject: [aw610_r] pyro mode Tuesday 3/26 In-Reply-To: <262346280.1154013.1364276805825.JavaMail.root@stanford.edu> Message-ID: <1960717823.1154429.1364276906046.JavaMail.root@stanford.edu> Hi All, I'll use a couple of hours of pyro time on aw610_r tomorrow (Tuesday, 3/26) from 4pm-6pm. Let me know if anyone else needs pyro else I will convert it back to TC as soon as I'm done. Regards, Archana -------------- next part -------------- An HTML attachment was scrubbed... URL: