charley at snf.stanford.edu
Wed Oct 2 09:23:15 PDT 2002
The Raith is up and running patterns. I'm looking into the
errors we see often: why are they a daily occurrence and is there
something we can do or is it a machine problem, and how to clear these
The 700F is up and running. Remember: if it won't find marks,
update the stage mark positions, then it will see your wafer marks, too.
The 4160 is up and we have about ten users. If you need some
help on it, let me know.
The S-800 is up and the Semicaps people are finally coming
through on the image capture problems.
More information about the beamtools