Hitachi HL-700-F update to problems reported over weekend.

James Conway jwc at snf.stanford.edu
Mon Oct 28 10:30:37 PST 2002


Hello:
 Ebeam System was checked and no problems were encountered.

I readjusted focus and returned to the same values as before.
Other users have reported good results.

All Users:  Please report to me your results and copy me your SEM images

from your SEM inspection's, and especially report any error messages you
may
encounter.

Thank you for your support!

James Conway
E-beam Technology Group
650-725-7075


RE: Re: reservation canceled
Xiaolei Liu wrote:

> The machine is not in a good state now. All reservations during the
> weekend has been deleted.
>
> liux


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