Beamtools report for Manday April 1, 2003

James Conway jwc at snf.stanford.edu
Tue Apr 1 15:51:36 PST 2003


Greetings:

All E-beam and SEM systems are up and available for users,
however due to SU funding constraints we are unable to reorder new
electrons for these critical systems. Users are requested to bring back
all the electrons you have wasted in your SEM analysis. Happy April
Fools Day!  :-)

Semhitachi, S-800 FE-SEM is up.
Please don't initially flash the tip when bringing up the system. Only
flash if you see emission current instability. A new SOP procedure is in
place, a copy is in the SEM LAB.

Ebeam, H-700 Ebeam Exposure System is up and available to users.
Users are requested to report minimum feature resolved on the system
last month.

S-4160 is up and ready for your use.

RAITH 150 is up and available for users.
Users are requested to report minimum feature resolved on the system
last month.
We will be bringing the system down for maintenance later this week,
likely Friday.

Paul Jerabek is on vacation this week.
James has just returned from Germany and is available during his office
hour, 8:30 to 9:30 daily at CIS 31.  Thank you for your interest in
E-beam Lithography and SEM at SNF!

James Conway || Paul Jerabek || Charley Williams III
E-beam Technology Group, Stanford Nanofabrication Facility
650-725-7075
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