Beamtools report for Friday April 11, 2003

James Conway jwc at
Fri Apr 11 11:08:54 PDT 2003


All  SEM systems are up and available for users:

Semhitachi, S-800 FE-SEM is up.
Please don't initially flash the tip when coming onto the system. Only
flash after you see emission current instability.
Please review the new SOP procedure, a copy is in the SEM LAB.

Ebeam, H-700 Ebeam Exposure System is DOWN and NOT available to users.
Laser has been ordered...

S-4160 is up and ready for your use.

RAITH 150 is up and available for users.
The system schedule is nearly full, see James Conway if you are having
problems making a reservation on CORAL.
We will be bringing the system off-line for more measurements working
with RAITH USA next week WED. & THURSDAY.

Thank you for your interest in E-beam Lithography and SEM at SNF!

James Conway || Paul Jerabek || Charley Williams III
E-beam Technology Group, Stanford Nanofabrication Facility
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