BEAMTOOLS REPORT FOR TUESDAY FEBRUARY 11, 2003

James Conway jwc at snf.stanford.edu
Tue Feb 11 09:22:48 PST 2003


Greetings:

CORL IS BACK UP!  
Please return to CORL for making your reservations and enabling machines 
in your name/account.
PLEASE REPORT YOUR BEAMTOOLS USAGE FOR LAST WEEK IN HOURS TO ME AND WE 
CAN GET YOUR TIME UPDATED  ON CORL SYSTEM.  
You can do this either:
By EMAIL:  SUBJECT: MY BEAM TOOL TIME, tool name, time enabled , corl 
login name.
In person: During  my office hour is 8:30 - 9:30 AM daily.  CSI 31.

BEAM TOOL STATUS 9 AM Tuesday FEB. 11, 2003:

S-800 is up and ready for all users.

S-4160 is up and ready for all users.

EBEAM H-700 is up and available for all users.
    SNF staff and lab members continue to evaluate resolution and 
stitching on the STD. PMMA. process.

RAITH is up and available for all users.
    A work around procedure is in effect to minimize field rotation 
effects that lead to a stitching errors reported  in recent weeks.  The 
system is suitable for most users on patterns less than  1 - 2 mm 
 square in die size.

Thank you for your interest in E-beam Technologies here at SNF.

James Conway
E-beam Technology Group
Stanford Nanofabrication Facility
650-725-7075
jwc at snf.stanford.edu






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