First Announcement: Ebeam Town Hall Meeting for Wednesday June 14, 2006 from 3 - 4:30 PM

James Conway jwc at
Tue Jun 6 18:26:35 PDT 2006

Greetings Ebeam and Raith Communities:

The next Ebeam Town Hall Meeting will be held Wednesday June 14, 2006 
from 3 - 4:30 PM in CIS 201. We hope to have a good turnout for this 
meeting as we sincerely desire your input and feedback on how to manage 
our Ebeam Lithography systems with so many Lab Members working on these 

The agenda and items for discussion are currently open for your input 
and any request.

Ebeam Town Hall Meeting Agenda:

1. Welcome and Introduction by James Conway                             
( 5 minutes)

2. Today's Feature Presentation:                                       ( 
40 minutes + 10 for Q&A)

Leo P. Schuler

MacDiarmid Institute for Advanced Materials & Nanotechnology

Department of Electrical and Computer Engineering

University of Canterbury, Christchurch, New Zealand

Fabrication of functional ZnO coatings and optimizations for improved 
piezoelectric properties and photoluminescence

Zinc Oxide (ZnO) is a versatile material which has attractive 
dielectric, piezoelectric, semiconducting, acousto-optic, nonlinear 
optical, and electrical properties. ZnO nanomaterials are promising 
candidates for nanoelectronics and photonics. Compared with other 
semiconductor materials, ZnO has a high exciton binding energy of 60 
meV, which gives it a high potential for room temperature light 
emission, it is more resistant to radiation, and is multifunctional as 
it has piezoelectric, ferroelectric, and ferromagnetic properties. ZnO 
can be deposited in a multitude of ways.

In our department, we have been focusing in sputtering deposition. I 
have been concentrating on fabricating highly piezoelectric films with 
good photoluminescence properties. However, these two properties are 
somewhat contradictory.

The choice of base substrate, sputtering parameters, and post deposition 
treatment (annealing and dry Etching) leads to modification of the 
crystal structure and the surface properties, which in turn leads to 
more intense photoluminescence (PL) response.


The converse piezoelectric effect on sputtered ZnO was analyzed using 
interferometric methods and for the first time, using piezoelectric 
force microscopy (PFM). PFM is a variation of atomic force microscopy 
that can be applied to investigate piezoelectric thin films at the 
nanometer scale.


Surface acoustic wave devices (SAW) were fabricated on various ZnO films 
and used to detect changes in UV light intensities.

Finally I will give a short overview about the range of activities in 
the area of ZnO "Down Under".

3. Raith Reservation and Scheduling Issues: (15 minutes )
Managing the Raith 150 system with a large number of users of various 
experience levels:
 - Proposed Changes or Modification to the currently existing policies 
in place?
 - Cancellation Policy -- 24 hour notice?
 - Should we penalize users whom cancel, or repeatedly not show up for 
their reservations?
 - Should we implement a Raith System Standby Users listing?
 - 'Share the Ride' incentive for users working with small chips.

4. Additional Items to be determined... The Agenda remains open and 
waiting for your input!

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